레이저 기계 및 시스템
바리오라스
Systems based on the powerful COMPex excimer laser are flexible tools for high quality UV microprocessing with a line beam or a square beam field shape.
Superior optical design, rugged mechanics, and an excimer laser with unmatched pulse-to-pulse stability deliver precision results. Applications include Laser Lift-Off (LLO) Separation, Dopant Ion Activation, Ablative Patterning, and Thin Film Annealing.
VarioLas – Some Key Performance Metrics
Get precise ablation or material modification results with the high (up to 7.5 J/cm2) energy density and 100 Hz pulse repetition frequency of VarioLas.
