레이저 기계 및 시스템
엑시머 빔 전달 광학
Superior quality optics matched to the unique combination of high pulse energy, short UV wavelengths, and high power.
Many applications for excimer lasers need delivery optics – for projecting, homogenizing, and/or attenuating the beam. Coherent uses an unmatched combination of experience and technical knowledge to create optomechanical tools for this challenge.
Excimer Beam Delivery Optics - Overview
Simplify your excimer laser application with standard and custom beam delivery optics and optomechanical modules.
제품 사양
제품 유형 |
주요 기능 |
Attenuators |
Variable attenuator includes compensator plate to eliminate beam walk-off |
Homogenizers |
Generates 5x5 mm or 10x10 mm uniform field with <± 5% variation |
Projection Lenses |
5X or variable 4-10X demagnification with higher values on request |
