일반 광학
Micro Lens Arrays
Create highly compact collimation and focusing systems using our one- or two-dimensional microlens arrays (MLAs).
Coherent MLAs are typically configured with the individual lenslets arranged in a square or hexagonal periodic pattern, with a lens pitch of a few hundred micrometers. They can be fabrication using nanoimprinting, photolithography, and glass molding.
Micro Lens Array Capabilities
Coherent can produce MLAs with a wide variety of structures in various materials. High volume production of near infrared MLAs can be accomplished on 6 inch Si wafers.
Silicon Microlens Array Specifications
Material Specifications |
|
재료 |
실리콘 |
Reflective index |
≈ 3.42 |
Transparency |
R <0.2% T >99% @ 1260-1340 nm |
Fabrication Specifications |
|
Diameter |
600 ±5 μm |
Thickness |
400 ±10 μm |
Pitch |
750 ±1 μm |
Clear Aperture |
>510 nm |
Radius of curvature |
3.0 mm |
Conic |
0 |
Surface roughness |
<5 nm RMS |
Lens surface profile deviation |
<35 nm RMS |
Surface quality |
Scratch-dig: 5/1x0.025 base on ISO 10110-7 |
Chipping |
<100 μm |
Edge verticality |
90 ±2° |
관련 제품
광학 제조 역량
Coherent 소재 성장, 가공, 코팅, 조립에 이르는 수직 통합 역량과 철저한 품질 보증(QA) 프로세스에 대해 알아보십시오. 이러한 역량이 어떻게 당사 광학 부품의 성능과 신뢰성을 보장하고, 공급망의 위험과 불확실성을 최소화하는지 확인해 보십시오.
