광학
Lithium Niobate Wafers
Use Lithium Niobate's unique combination of high refractive index and visible and infrared transmission to makes waveguides, modulators, and sensors on our wafers.
Lithium niobate is a multifunctional material with high chemical and heat stability. Its high refractive index (>2.3) compared with glass (1.5) enables a large field-of-view when fabricated in wafer form for waveguide design.
니오븀 리튬 웨이퍼
Depend on Coherent, with over a decade of experience in Lithium Niobate wafer manufacturing, to provide wafers that meet your exact requirements.
Material Specifications |
|
재료 |
Congruent: LiNbO3 |
Material quality |
Bubble or inclusion <100 μm Qty <8, 30 μm < bubble size < 100 μm |
Orientation |
Y cut ±0.2° |
Density |
4.65 g/cm3 |
Curie temperature |
1142 ±1℃ |
Transparency |
>95% for 10 mm thickness over 450 - 700 nm |
Fabrication Specifications |
|
Diameter |
150 mm ± 0.2 mm |
Thickness |
350 μm ± 10 μm |
Flatness Total thickness variation(TTV) Local thickness variation (LTV) Bow Roughness |
<1.3 μm Warp < 70 μm @ 150 mm wafer <70 μm @ 150 mm wafer Rq ≤0.5 nm (RMS value by AFM) |
Surface quality |
40-20 |
Particles |
Non-removable particles: 100-200 μm ≤3 particles, 20-100 μm ≤20 particles |
Chip |
<300 μm (full wafer, without exclusion zone) |
Crack |
No crack (full wafer) |
Contamination |
No non-removable stain (full wafer) |
Parallelism |
<30 arc second |
Orientation refer flat (x-axis) |
47 ±2 mm |
관련 제품
광학 제조 역량
Coherent 소재 성장, 가공, 코팅, 조립에 이르는 수직 통합 역량과 철저한 품질 보증(QA) 프로세스에 대해 알아보십시오. 이러한 역량이 어떻게 당사 광학 부품의 성능과 신뢰성을 보장하고, 공급망의 위험과 불확실성을 최소화하는지 확인해 보십시오.
